A 500 m2 clean room includes ISO6 (yellow room), ISO7 and ISO8 (dressing room). The clean room is equipped with all the main systems for micro and nanofabrication, from lithography and nanopatterning tools to deposition and etching equipment, back-end machines and metrology tools. Chemical benches are available for wet processes.
Users of the clean room are researchers and students of the Nanostructures Department, as well as from other departments.
